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研究論文 TSV

2013
  1. Hideharu Shimizu, Yudai Suzuki, Takeshi Nogami, Nobuo Tajima, Takeshi Momose, Yoshihiko Kobayashi, Yukihiro Shimogaki. CVD and ALD Co(W) Films Using Amidinato Precursors as a Single-Layered Barrier/Liner for Next-Generation Cu-Interconnects. ECS Journal of Solid State Science and Technology. 2 [7] (2013) P311-P315 10.1149/2.008307jss
  2. Hideharu Shimizu, Shuji Nagano, Akira Uedono, Nobuo Tajima, Takeshi Momose, Yukihiro Shimogaki. Material design of plasma-enhanced chemical vapour deposition SiCH films for low-kcap layers in the further scaling of ultra-large-scale integrated devices-Cu interconnects. Science and Technology of Advanced Materials. 14 [5] (2013) 055005 10.1088/1468-6996/14/5/055005
2010
  1. Tatsuya Ukegawa, Takafumi Kinuta, Tomohiro Sato, Nobuo Tajima, Reiko Kuroda, Yoshio Matsubara, Yoshitane Imai. Colored supramolecular charge-transfer host system using 10,10′-dihydroxy-9,9′-biphenanthryl and 2,5-disubstituted-1,4-benzoquinone. Tetrahedron. 66 [45] (2010) 8756-8762 10.1016/j.tet.2010.08.074
  2. Yoshi Ohashi, Nobuo Tajima, Yonghua Xu, Takeshi Kada, Shuji Nagano, Hideharu Shimizu, Satoshi Hasaka. Proposal of New Precursors for Plasma-Enhanced Chemical Vapor Deposition of SiOCH Low-kFilms with Plasma Damage Resistance. Japanese Journal of Applied Physics. 49 [5] (2010) 05FF03 10.1143/jjap.49.05ff03
  3. Hideharu Shimizu, Nobuo Tajima, Takeshi Kada, Shuji Nagano, Yoshi Ohashi, Satoshi Hasaka. Novel Precursor for Development of Si–C2H4–Si Networks in SiCH for Application as a Low-kCap Layer beyond 22 nm Nodes. Japanese Journal of Applied Physics. 49 [5] (2010) 05FF02 10.1143/jjap.49.05ff02
  4. Takafumi Kinuta, Kensaku Kamon, Nobuo Tajima, Tomohiro Sato, Reiko Kuroda, Yoshio Matsubara, Yoshitane Imai. Complexation behaviour of a CT complex composed of 9,10-bis(3,5-dihydroxyphenyl)anthracene and viologen derivatives. Supramolecular Chemistry. 22 [4] (2010) 221-227 10.1080/10610270903254167
  5. Takafumi Kinuta, Nobuo Tajima, Tomohiro Sato, Reiko Kuroda, Yoshio Matsubara, Yoshitane Imai. Preparation of supramolecular host complex composed of 1D charge-transfer column-like structure using 6,6′-disubstituted-1,1′-bi-2-naphthol and methylviologen. Journal of Molecular Structure. 964 [1-3] (2010) 27-30 10.1016/j.molstruc.2009.11.006
2009
  1. Takafumi Kinuta, Kensaku Kamon, Takunori Harada, Yoko Nakano, Nobuo Tajima, Tomohiro Sato, Michiya Fujiki, Reiko Kuroda, Yoshio Matsubara, Yoshitane Imai. Solid-State Chiral Supramolecular Organic Fluorophore Having a π-Conjugated Phenylene Ethynylene Unit. European Journal of Organic Chemistry. 2009 [33] (2009) 5760-5764 10.1002/ejoc.200900782
  2. Yoshitane Imai, Kensaku Kamon, Kakuhiro Kawaguchi, Nobuo Tajima, Tomohiro Sato, Reiko Kuroda, Yoshio Matsubara. Crystal Structure of 9,10-Dipentafluorophenylanthracene Host System. Letters in Organic Chemistry. 6 [7] (2009) 588-592 10.2174/157017809789869582
  3. Takafumi Kinuta, Yuko Kise, Kensaku Kamon, Nobuo Tajima, Tomohiro Sato, Reiko Kuroda, Yoshio Matsubara, Yoshitane Imai. Charge-transfer host complex with channel-like cavity using disubstituted-1,1′-bi-2-naphthol and benzylviologen. Tetrahedron Letters. 50 [42] (2009) 5786-5789 10.1016/j.tetlet.2009.07.090
  4. Yoshitane Imai, Kensaku Kamon, Takafumi Kinuta, Nobuo Tajima, Tomohiro Sato, Reiko Kuroda, Yoshio Matsubara. Multiple Molecular Recognition Host System using Charge-Transfer Complex of 3,3′-Disubstituted-1,1′-bi-2-naphthol and Methylviologen. Crystal Growth & Design. 9 [9] (2009) 4096-4101 10.1021/cg9003388
  5. Yoshitane Imai, Katuzo Murata, Yoko Nakano, Takunori Harada, Tomohiro Sato, Nobuo Tajima, Michiya Fujiki, Reiko Kuroda, Yoshio Matsubara. Solid-State Optical Properties of a Chiral Supramolecular Organic Fluorophore Consisting of Fluorescent 1-Pyrenesulfonic Acid and Amine Molecules. European Journal of Organic Chemistry. 2009 [19] (2009) 3244-3248 10.1002/ejoc.200900235
  6. Yoshitane Imai, Takafumi Kinuta, Keiko Nagasaki, Takunori Harada, Tomohiro Sato, Nobuo Tajima, Yoh Sasaki, Reiko Kuroda, Yoshio Matsubara. Conformational and color polymorphism of achiral 2-methyl-3-(2-naphthalenylthio)-1,4-naphthalenedione. CrystEngComm. 11 [7] (2009) 1223 10.1039/b900806c
  7. Yoshitane Imai, Takafumi Kinuta, Kensaku Kamon, Nobuo Tajima, Tomohiro Sato, Reiko Kuroda, Yoshio Matsubara. Complexation Behavior of Binaphthol/Tetrafluoro-1,4-benzoquinone Charge-Transfer Complex. Crystal Growth & Design. 9 [5] (2009) 2393-2397 10.1021/cg801287p
  8. Yoshitane Imai, Kensaku Kamon, Takafumi Kinuta, Tomohiro Sato, Nobuo Tajima, Reiko Kuroda, Yoshio Matsubara. Colored Supramolecular Host System Using a Charge-Transfer Complex Composed of 1,1′-Bi-2-naphthol and 2,5-Substituted 1,4-Benzoquinone. European Journal of Organic Chemistry. 2009 [15] (2009) 2519-2525 10.1002/ejoc.200900004
  9. Yoshitane Imai, Takafumi Kinuta, Kensaku Kamon, Nobuo Tajima, Tomohiro Sato, Reiko Kuroda, Yoshio Matsubara. Charge-transfer host system composed of 9,10-bis(3,5-dihydroxyphenyl)anthracene and methylviologen. Tetrahedron. 65 [18] (2009) 3740-3744 10.1016/j.tet.2009.02.044
  10. Natsuyo Asano, Takunori Harada, Tomohiro Sato, Nobuo Tajima, Reiko Kuroda. Supramolecular chirality measured by diffuse reflectance circular dichroism spectroscopy. Chemical Communications. [8] (2009) 899 10.1039/b821686j
2008
  1. Yoshitane Imai, Kensaku Kamon, Shingo Kido, Takunori Harada, Nobuo Tajima, Tomohiro Sato, Reiko Kuroda, Yoshio Matsubara. Formation and crystal structure of the chiral charge-transfer complex with axially chiral 1,1′-bis-2-naphthol derivatives and tetracyanobenzene. CrystEngComm. 11 [4] (2008) 620-624 10.1039/b817131a
  2. Yoshitane Imai, Kensaku Kamon, Shingo Kido, Tomohiro Sato, Nobuo Tajima, Reiko Kuroda, Yoshio Matsubara. Molecular Recognition Properties of a Charge-Transfer Host System Composed of 10,10′-Dihydroxy-9,9′-biphenanthryl and Viologen Derivatives. European Journal of Organic Chemistry. 2008 [28] (2008) 4784-4789 10.1002/ejoc.200800567
  3. Yoshitane Imai, Kensaku Kamon, Takafumi Kinuta, Nobuo Tajima, Tomohiro Sato, Reiko Kuroda, Yoshio Matsubara. Preparation and Crystal Structure of Guest-Dependent Charge-Transfer Host System Using 1,1′-Bi-2-naphthol and 2-Chloro-5-methyl-benzoquinone. Crystal Growth & Design. 8 [10] (2008) 3493-3496 10.1021/cg800211v
  4. Yoshitane Imai, Kakuhiro Kawaguchi, Tomohiro Sato, Nobuo Tajima, Reiko Kuroda, Yoshio Matsubara. Guest Inclusion Style of 9,10-Diphenylanthracene. Molecular Crystals and Liquid Crystals. 487 [1] (2008) 153-159 10.1080/15421400802198672
  5. Yoshitane Imai, Katuzo Murata, Kakuhiro Kawaguchi, Tomohiro Sato, Nobuo Tajima, Reiko Kuroda, Yoshio Matsubara. A Solid-State Fluorescent Host System with a 21 -Helical Column Consisting of Chiral (1R ,2S )-2-Amino-1,2-diphenylethanol and Fluorescent 1-Pyrenecarboxylic Acid. Chemistry - An Asian Journal. 3 [3] (2008) 625-629 10.1002/asia.200700338
  6. Yoshitane Imai, Kakuhiro Kawaguchi, Nobuo Tajima, Tomohiro Sato, Reiko Kuroda, Yoshio Matsubara. A coincident spontaneous resolution system for racemic1,1′-binaphthyl-2,2′-dicarboxylic acid and 1,2-diphenylethylenediamine induced by water. Chem. Commun.. [3] (2008) 362-364 10.1039/b714226a
2007
  1. Yoshitane Imai, Shingo Kido, Kensaku Kamon, Takafumi Kinuta, Tomohiro Sato, Nobuo Tajima, Reiko Kuroda, Yoshio Matsubara. A Charge-Transfer Complex of 10,10‘-Dihydroxy-9,9‘-biphenanthryl and Methylviologen as a Visual Inclusion Host System. Organic Letters. 9 [24] (2007) 5047-5050 10.1021/ol702286r
  2. Yoshitane Imai, Kensaku Kamon, Takafumi Kinuta, Nobuo Tajima, Tomohiro Sato, Reiko Kuroda, Yoshio Matsubara. A charge-transfer host system composed of a chiral 1,1′-bi-2-naphthol cluster and benzylviologen. Tetrahedron. 63 [48] (2007) 11928-11932 10.1016/j.tet.2007.09.018
  3. Yoshitane Imai, Kensaku Kamon, Takafumi Kinuta, Tajima Nobuo, Tomohiro Sato, Reiko Kuroda, Yoshio Matsubara. An isoselective and visual inclusion host system using charge-transfer complexes of 3,3′-disubstituted-1,1′-bi-2-naphthol and methylviologen. Tetrahedron Letters. 48 [36] (2007) 6321-6325 10.1016/j.tetlet.2007.07.023
  4. Nobuo Tajima, Takahisa Ohno, Tomoyuki Hamada, Katsumi Yoneda, Seiichi Kondo, Nobuyoshi Kobayashi, Manabu Shinriki, Yoshiaki Inaishi, Kazuhiro Miyazawa, Kaoru Sakota, Satoshi Hasaka, Minoru Inoue. Carbon-Doped Silicon Oxide Films with Hydrocarbon Network Bonds for Low-kDielectrics: Theoretical Investigations. Japanese Journal of Applied Physics. 46 [9A] (2007) 5970-5974 10.1143/jjap.46.5970
  5. Yoshitane Imai, Junichi Kitazawa, Tomohiro Sato, Nobuo Tajima, Reiko Kuroda, Yoshio Matsubara, Zen-ichi Yoshida. Axial structures of biphenyl compounds linked by diethyl ether chains. Tetrahedron. 63 [9] (2007) 1995-1999 10.1016/j.tet.2006.12.056

書籍 TSV

会議録 TSV

2006
  1. TAJIMA, Nobuo, OHNO, Takahisa, HAMADA, Tomoyuki, YONEDAKatsumi, KOBAYASHINobuyoshi, SHINRIKIManabu, MIYAZAWAKazuhiro, SAKOTAKaoru, HASAKASatoshi, INOUEMinoru. Carbon-Rich SiOCH Films with Hydrocarbon Network Bonds for Low-k Dielectrics:First-Principles Investigation. Proceeding of the 2006 International Interconnect Technology Conference 2006, 122-125
2005
  1. TAJIMA, Nobuo, HAMADA T, OHNO, Takahisa, 米田克己, 小林伸好, 羽坂智, 井上實. First-Principle Molecular Model of PECVD SiOCH Film for the Mechanical and Dielectric Property Investigation. Proc. 2005 IITC, (2005) 2005, 66-68

口頭発表 TSV

2015
  1. KANEKO, Tomoaki, TAJIMA, Nobuo, OHNO, Takahisa. First Principles Study on Bottom-up Fabrication Process of Atomically Precise Graphene Nanoribbons. 28th International Microprocesses and Nanotechnology Conference. 2015
  2. 金子 智昭, 山崎 隆浩, 田島 暢夫, 奈良 純, 清水達雄, 加藤弘一, 大野 隆央. 4H-SiC(0001)/SiO2 界面欠陥準位の第一原理解析:欠陥構造の重要性. 先進パワー半導体分科会 第2回講演会. 2015
  3. 山崎 隆浩, 田島 暢夫, 金子 智昭, 奈良 純, 清水達雄, 加藤弘一, 大野 隆央. SiC熱酸化により生成するSiO2/SiC界面の化学種に関する理論的研究. 先進パワー半導体分科会第二回講演会. 2015
  4. 山崎 隆浩, 田島 暢夫, 金子 智昭, 奈良 純, 清水達雄, 加藤弘一, 大野 隆央. 酸素分子による4H-SiC/SiO2界面酸化の第一原理動的シミュレーション. 先進パワー半導体分科会第2回講演会. 2015
  5. 金子 智昭, 山崎 隆浩, 田島 暢夫, 大野 隆央. 様々な結晶多形の SiC 表面での pi-結合鎖模型の安定性. 日本物理学会 2015秋季大会. 2015
  6. 山崎 隆浩, 田島 暢夫, 金子 智昭, 奈良 純, 清水達夫, 加藤弘一, 大野 隆央. シリコン・カーバイド熱酸化プロセスに関する第一原理的研究. 応用物理学会秋季学術講演会. 2015
  7. 金子 智昭, 山崎 隆浩, 田島 暢夫, 大野 隆央. 4H-SiC 表面のπ-結合鎖模型の安定性についての第一原理解析 . 第62回応用物理学会春期学術講演会. 2015
  8. 山崎 隆浩, 田島 暢夫, 金子 智昭, 西川宜孝, 清水達雄, 加藤弘一, 大野 隆央. 4H-SiC酸化の第一原理/古典的分子動力学シミュレーション. 応用物理学会春季学術講演会. 2015
  9. 田島 暢夫, 金子 智昭, 山崎 隆浩, 奈良 純, 大野 隆央. 次世代デバイス材用の第一原理シミュレーション. 文部科学省HPCI戦略プログラム分野4統合ワークショップ. 2015
  10. TAJIMA, Nobuo, KANEKO, Tomoaki, NARA, Jun, OHNO, Takahisa. A first principles study on CVD graphene growth on copper surface: C-C bonding reactions at graphene edges. American Physical Society March Meeting. 2015
2014
  1. 山崎 隆浩, 田島 暢夫, 小山洋, 奈良 純, 清水達雄, 加藤弘一, 大野 隆央. 酸素分子による4H-SiC表面酸化の動的シミュレーションおよび第一原理解析. 先進パワー半導体分科会 第1回講演会. 2014
  2. 田島 暢夫. Cu 表面上のCVD グラフェン成長に関する第一原理計算. NIMSナノシミュレーションワークショップ2014. 2014
  3. 田島 暢夫, 金子 智昭, 奈良 純, 大野 隆央. Cu表面上のCVDグラフェン成長に関する第一原理的研究. 応用物理学会秋季学術講演会. 2014
  4. KANEKO, Tomoaki, TAJIMA, Nobuo, OHNO, Takahisa. First-principles study on formation of atomically precise graphene nanoribbons. IEEE International Nanoelectronics Conference 2014. 2014
  5. 田島 暢夫, 金子 智昭, 奈良 純, 大野 隆央. Cu表面上のCVDグラフェン成長における炭素原子反応:第一原理的研究. 応用物理学会春季学術講演会. 2014
  6. 金子 智昭, 田島 暢夫, 大野 隆央. グラフェン・ナノリボンのボトムアップ成長における 金属表面ステップの影響についての第一原理解析 . 第61回応用物理学会春季学術講演会. 2014
  7. KANEKO, Tomoaki, TAJIMA, Nobuo, OHNO, Takahisa. Role of Au surface step edge on bottom-up growth of atomically precise graphene nanoribbons: First-principles study. American physical society march meeting 2014. 2014
  8. TAJIMA, Nobuo, KANEKO, Tomoaki, NARA, Jun, OHNO, Takahisa. Carbon atom reactions in CVD graphene growth on copper surface: A first principles study. American physical society march meeting 2014. 2014
2006
  1. TAJIMA, Nobuo, OHNO, Takahisa, HAMADA, Tomoyuki, KatsumiYoneda, Seiichi Kondo, Nobuyoshi Kobayashi, Manabu Sinriki, Kazuhiro Miyazawa, Kaoru Sakota, Satoshi Hasaka, Minoru Inoue. SiOCH Films with hydrocarbon Network Bonds:First-Principles Investigation. SSDM 2006. 2006
  2. 田島 暢夫, 大野 隆央, 濱田 智之, 小林伸好, 米田克己, 井上實, 羽坂智, 迫田薫, 宮澤和浩, 神力学. SiOCH low-k膜の構造と物性:理論計算による検討. 日本化学会第86春季年会(2006). 2006
2005
  1. TAJIMA, Nobuo, HAMADA, Tomoyuki, OHNO, Takahisa, 米田克己, 小林伸好, 羽坂智, 井上實. Hydrocarbon Groups and Film Properties of SiOCH Dielectrics: Theoretical Investigations using Molecular Models. SSDM( Solid State Devices and Materials ). 2005

特許 TSV

登録特許
  1. 特許第5614589号 絶縁膜材料を用いた成膜方法および絶縁膜 (2014)
  2. 特許第5505680号 絶縁膜材料、この絶縁膜材料を用いた成膜方法および絶縁膜 (2014)
  3. 特許第5317089号 成膜方法および絶縁膜 (2013)
  4. 特許第4997435号 絶縁膜用材料およびその成膜方法 (2012)
公開特許
  1. 特開2008263022号 絶縁膜材料、この絶縁膜材料を用いた成膜方法および絶縁膜 (2008)
  2. 特開2007318067号 絶縁膜材料、この絶縁膜材料を用いた成膜方法および絶縁膜 (2007)
  3. 特開2007318070号 絶縁膜材料、この絶縁膜材料を用いた成膜方法および絶縁膜 (2007)
  4. 特開2007221039号 絶縁膜および絶縁膜材料 (2007)
  5. 特開2007048955号 絶縁膜用材料、この絶縁膜用材料を用いた成膜方法および絶縁膜 (2007)
  6. 特開2007042747号 絶縁膜の成膜方法及び絶縁膜 (2007)
  7. 特開2006282929号 分子構造予測方法 (2006)
外国特許
  1. No. CN102308020A Insulating film material, and film formation method utilizing same, and insulating film (2012)
  2. No. US20110313184A1 INSULATING FILM MATERIAL, AND FILM FORMATION METHOD UTILIZING THE MATERIAL, AND INSULATING FILM (2011)
  3. No. KR2011122830A Depositing method using the dielectric layer material, and this dielectric layer material and insulating layer. (2011)
  4. No. CN102138205A Insulating film material, film forming method using the same and insulating film (2011)
  5. No. US20110159212A1 INSULATING FILM MATERIAL, METHOD FOR FORMING FILM BY USING THE INSULATING FILM MATERIAL, AND INSULATING FILM (2011)
  6. No. US20110130584A1 INSULATING FILM MATERIAL, METHOD OF FILM FORMATION USING INSULATING FILM MATERIAL, AND INSULATING FILM (2011)
  7. No. KR2011055643A INSULATING FILM MATERIAL, METHOD FOR FORMING FILM BY USING THE INSULATING FILM MATERIAL, AND INSULATING FILM (2011)
  8. No. CN101925690A Insulating film material, film forming method using same, and insulating film (2010)
  9. No. KR2010119758A INSULATING FILM MATERIAL, METHOD OF FILM FORMATION USING INSULATING FILM MATERIAL, AND INSULATING FILM (2010)
  10. No. TW201035365A Insulator film material, film formation method and insulator film that use the same (2010)
  11. No. WO2010090038A1 INSULATING FILM MATERIAL, AND FILM FORMATION METHOD UTILIZING THE MATERIAL, AND INSULATING FILM (2010)
  12. No. TW201016710A A material which forms an insulating film, a film forming method using the same, and an insulating film using the same (2010)
  13. No. WO2010023964A1 INSULATING FILM MATERIAL, METHOD FOR FORMING FILM BY USING THE INSULATING FILM MATERIAL, AND INSULATING FILM (2010)
  14. No. TW200938654A Insulating film material, method of film formation using insulating film material, and insulating film (2009)
  15. No. WO2009093581A1 INSULATING FILM MATERIAL, FILM FORMING METHOD USING THE INSULATING FILM MATERIAL, AND INSULATING FILM (2009)
  16. No. WO2007018268A1 MATERIAL FOR INSULATING FILM, METHOD OF FILM FORMATION THEREFROM AND INSULATING FILM (2007)
  17. No. WO2007015433A1 METHOD FOR FORMING INSULATING FILM AND INSULATING FILM (2007)
  18. No. WO2006109686A1 MATERIAL FOR INSULATING FILM AND PROCESS FOR PRODUCING THE SAME (2006)

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