HOME > Published patent applications > Detail[Published patent application] 絶縁膜の成膜方法及び絶縁膜2007-02-15. 2007042747 (Google Patents) NIMS author(s)TAJIMA, NobuoCreated at :2023-07-22 21:45:07 +0900 Updated at :2023-07-22 21:45:07 +0900