- Address
- 305-0044 茨城県つくば市並木1-1 [アクセス]
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- 人のつながり
研究内容
出版物2004年以降のNIMS所属における研究成果や出版物を表示しています。
研究論文
- Tomoaki Kaneko, Nobuo Tajima, Takahiro Yamasaki, Jun Nara, Tatsuo Schimizu, Koichi Kato, Takahisa Ohno. First-principles modeling of defect-free abrupt SiC/SiO2 interfaces on a- and m-face 4H-SiC. Applied Physics Express. 11 [10] (2018) 101304 10.7567/apex.11.101304
- Nobuo Tajima, Tomoaki Kaneko, Takahiro Yamasaki, Jun Nara, Tatsuo Schimizu, Koichi Kato, Takahisa Ohno. First-principles study on C=C defects near SiC/SiO2 interface: Defect passivation by double-bond saturation. Japanese Journal of Applied Physics. 57 [4S] (2018) 04FR09 10.7567/jjap.57.04fr09
- Tomoaki Kaneko, Nobuo Tajima, Takahiro Yamasaki, Jun Nara, Tatsuo Schimizu, Koichi Kato, Takahisa Ohno. Hybrid density functional analysis of distribution of carbon-related defect levels at 4H-SiC(0001)/SiO2 interface. Applied Physics Express. 11 [1] (2018) 011302 10.7567/apex.11.011302
会議録
- TAJIMA, Nobuo, OHNO, Takahisa, HAMADA, Tomoyuki, YONEDAKatsumi, KOBAYASHINobuyoshi, SHINRIKIManabu, MIYAZAWAKazuhiro, SAKOTAKaoru, HASAKASatoshi, INOUEMinoru. Carbon-Rich SiOCH Films with Hydrocarbon Network Bonds for Low-k Dielectrics:First-Principles Investigation. Proceeding of the 2006 International Interconnect Technology Conference. 2006, 122-125
- Takahiro Yamasaki, Nobuo Tajima, Tomoaki Kaneko, Nobutaka Nishikawa, Jun Nara, Tatsuo Schimizu, Koichi Kato, Takahisa Ohno. 4H-SiC Surface Structures and Oxidation Mechanism Revealed by Using First-Principles and Classical Molecular Dynamics Simulations. MATERIALS SCIENCE FORUM. 2016, 429-432
- TAJIMA, Nobuo, KANEKO, Tomoaki, YAMASAKI, Takahiro, NARA, Jun, Tatsuo Schimizu, Koichi Kato. A first principles study on the C=C defects near SiC/SiO2 interface: Defect passivation by double bond saturation. Proceedings of Solid State Device Material. 2017, 1077-1078
口頭発表
- 大野隆央, 奈良純, 田島暢夫, 甲賀淳一朗, 山崎隆浩. 低炭素社会実現のための密度汎関数法に基づいた第一原理分子動力学シミュレーション技術の 開発. 平成29年度地球シミュレータ利用報告会. 2018
- TAJIMA, Nobuo, OHNO, Takahisa. Carbon atom clustering and cluster growth in CVD graphene formation on nickel surface: A theoretical study. Conference on Computational Physics. 2012
- 田島 暢夫, 奈良 純, 山崎 隆浩, 小沢拓, 新田浩也, 大畠広介, 大野 隆央. Hydrated perfluorosulfonic acid electrolyte at platinum interface: Dissipative particle dynamics simulation. International Symposium on Polymer Electrolytes. 2018
特許
- 特許第4997435号 絶縁膜用材料およびその成膜方法 (2012)
- 特許第5317089号 成膜方法および絶縁膜 (2013)
- 特許第5505680号 絶縁膜材料、この絶縁膜材料を用いた成膜方法および絶縁膜 (2014)
第二期開発予定
第二期開発予定