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Research

PublicationsNIMS affiliated publications since 2004.

Proceedings
Patents
  • No. 4997435 絶縁膜用材料およびその成膜方法 (2012)
  • No. 5317089 成膜方法および絶縁膜 (2013)
  • No. 5505680 絶縁膜材料、この絶縁膜材料を用いた成膜方法および絶縁膜 (2014)
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