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Carbon-Rich SiOCH Films with Hydrocarbon Network Bonds for Low-k Dielectrics:First-Principles Investigation
(低誘電率材料のための、炭素含有量が多く炭化水素ネットワーク結合を有するＳｉOCH膜：第一原理的研究)
2006 International Interconnect Technology Conference. June 05, 2006-June 07, 2006.
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Created at: 2022-09-05 11:50:55 +0900 Updated at: 2022-09-05 11:50:55 +0900