Hydrocarbon Groups and Film Properties of SiOCH Dielectrics: Theoretical Investigations using Molecular Models
SSDM( Solid State Devices and Materials ). 2005.
NIMS著者
Materials Data Repository (MDR)上の本文・データセット
作成時刻: 2017-02-25 01:01:26 +0900更新時刻: 2017-07-10 19:25:23 +0900