HOME > Presentation > Detail
Hydrocarbon Groups and Film Properties of SiOCH Dielectrics: Theoretical Investigations using Molecular Models
SSDM( Solid State Devices and Materials ). 2005.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-02-25 01:01:26 +0900Updated at: 2017-07-10 19:25:23 +0900