HOME > Published patent applications > Detail[Published patent application] 絶縁膜材料、この絶縁膜材料を用いた成膜方法および絶縁膜2010-10-01. TW201035365 (Google Patents) 201035365 (Google Patents) NIMS author(s)TAJIMA, NobuoCreated at :2023-10-11 03:01:38 +0900 Updated at :2023-10-11 03:01:38 +0900
