[論文] | [書籍] | [会議録] | [口頭発表] | [その他の文献] | [公開特許出願]
論文 TSV
2025
- Wen Zhao, Guo Chen, Zhaozong Zhang, Satoshi Koizumi, Meiyong Liao. Frequency stability improvement of single-crystal diamond cantilever utilizing higher-order-mode excitation. Diamond and Related Materials. 157 (2025) 112592 10.1016/j.diamond.2025.112592
- Zhaozong Zhang, Grace Wong, Zilong Zhang, Wen Zhao, Guo Chen, Satoshi Koizumi, Meiyong Liao. Ultraprecise anisotropy mapping of Young's modulus in single-crystal diamond via mechanical resonance. Applied Physics Letters. 127 [18] (2025) 181904 10.1063/5.0303903
- Wen Zhao, Guo Chen, Tokuyuki Teraji, Yasuo Koide, Masaya Toda, Meiyong Liao. Ultra‐High Sensitivity, Wide‐Range Thermometry Based on High‐Quality Microscale Diamond Resonators. Advanced Materials. 37 [42] (2025) e02012 10.1002/adma.202502012 Open Access
- Wen Zhao, Guo Chen, Keyun Gu, Masaya Toda, Yasuo Koide, Meiyong Liao. High-order resonance enhancing the mass sensitivity of diamond cantilevers. APL Materials. 13 [4] (2025) 041124 10.1063/5.0250902 Open Access
2024
- Keyun Gu, Zilong Zhang, Guo Chen, Jian Huang, Yasuo Koide, Satoshi Koizumi, Wen Zhao, Meiyong Liao. Oxygen-termination effect on the surface energy dissipation in diamond MEMS. Carbon. 225 (2024) 119159 10.1016/j.carbon.2024.119159 Open Access
- Guo Chen, Satoshi Koizumi, Yasuo Koide, Meiyong Liao. Low-Energy Dissipation Diamond MEMS. Accounts of Materials Research. 5 [9] (2024) 1087-1096 10.1021/accountsmr.4c00139 Open Access
- Zilong Zhang, Keyun Gu, Guo Chen, Liwen Sang, Tokuyuki Teraji, Yasuo Koide, Satoshi Koizumi, Masaya Toda, Meiyong Liao. Highly Reliable Diamond MEMS Dual Sensor for Magnetic Fields and Temperatures with Self‐Recognition Algorithms. Advanced Materials Technologies. 9 [13] (2024) 2400153 10.1002/admt.202400153 Open Access
- Guo Chen, Zilong Zhang, Keyun Gu, Liwen Sang, Satoshi Koizumi, Masaya Toda, Haitao Ye, Yasuo Koide, Zhaohui Huang, Meiyong Liao. Higher-order resonance of single-crystal diamond cantilever sensors toward high f‧Q products. Applied Physics Express. 17 [2] (2024) 021001 10.35848/1882-0786/ad2027 Open Access
2023
- Zilong Zhang, Guo Chen, Keyun Gu, Satoshi Koizumi, Meiyong Liao. Effect of defects on Q factors of single-crystal diamond MEMS resonators. Functional Diamond. 3 [1] (2023) 2221280 10.1080/26941112.2023.2221280 Open Access
- Huanying Sun, Zilong Zhang, Yulong Liu, Guo Chen, Tiefu Li, Meiyong Liao. Diamond MEMS: From Classical to Quantum. Advanced Quantum Technologies. 6 [11] (2023) 2300189 10.1002/qute.202300189
- Guo Chen, Zilong Zhang, Yasuo Koide, Satoshi Koizumi, Zhaohui Huang, Meiyong Liao. Disclosing the annihilation effect of ion-implantation induced defects in single-crystal diamond by resonant MEMS. Diamond and Related Materials. 138 (2023) 110240 10.1016/j.diamond.2023.110240 Open Access
- Zilong Zhang, Wen Zhao, Guo Chen, Masaya Toda, Satoshi Koizumi, Yasuo Koide, Meiyong Liao. On‐chip Diamond MEMS Magnetic Sensing through Multifunctionalized Magnetostrictive Thin Film. Advanced Functional Materials. 33 [27] (2023) 2300805 10.1002/adfm.202300805
書籍 TSV
会議録 TSV
2024
- Keyun Gu, Zilong Zhang, Guo Chen, Liwen Sang, Jian Huang, Yasuo Koide, Meiyong Liao. Ultrahigh Responsivity of Diamond-based Solar-blind Photodetectors Using Hydrogen Plasma Treatment. 2024 IEEE 19th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS). (2024) 1-4 10.1109/nems60219.2024.10639852
- Zilong Zhang, Keyun Gu, Guo Chen, Yasuo Koide, Satoshi Koizumi, Meiyong Liao. Diamond NEMS Resonators for Real-Time Dual Sensing of Magnetic Fields and Temperatures up to 500°C. 2024 IEEE 19th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS). (2024) 1-5 10.1109/nems60219.2024.10639932
- Guo Chen, Zilong Zhang, Keyun Gu, Liwen Sang, Satoshi Koizumi, Masaya Toda, Yasuo Koide, Zhaohui Huang, Meiyong Liao. High-order resonance of single-crystal diamond MEMS with high-quality factor at high temperatures. 2024 IEEE 19th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS). (2024) 1-4 10.1109/nems60219.2024.10639909
口頭発表 TSV
2025
- CHEN, Guo, ZHAO, Wen, ZHANG, Zhaozong, KOIZUMI, Satoshi, LIAO, Meiyong. Developing nickel-catalyzed graphene/diamond heterostructures for MEMS applications. 第86回応用物理学会秋季学術講演会. 2025 Open Access
- ZHANG, Zhaozong, ZHAO, Wen, CHEN, Guo, KOIZUMI, Satoshi, LIAO, Meiyong. Characterization of Young’s Modulus Anisotropy of Single-Crystal Diamond. 第86回応用物理学会秋季学術講演会. 2025 Open Access
- ZHAO, Wen, CHEN, Guo, ZHANG, Zhaozong, KOIZUMI, Satoshi, LIAO, Meiyong. High-quality Factor Diamond MEMS Resonators for Ultra-precise Thermometry. 35th International Conference on Diamond and Carbon Materials (ICDCM 2025). 2025
- 顧 克云, ZHANG, Zilong, ZHAO, Wen, CHEN, Guo, KOIDE, Yasuo, KOIZUMI, Satoshi, LIAO, Meiyong. Revealing the Surface Adsorbates of Diamond Using MEMS Resonators. The 18th International Conference on New Diamond and Nano Carbons (NDNC 2025). 2025 Open Access
- CHEN, Guo, ZHAO, Wen, 顧 克云, KOIZUMI, Satoshi, KOIDE, Yasuo, LIAO, Meiyong. High Quality Factor Single-Crystal Diamond NEMS Cantilevers Fabricated by A Smart-Cut Method. The 18th International Conference on New Diamond and Nano Carbons (NDNC 2025). 2025 Open Access
2024
- 顧 克云, ZHANG, Zilong, CHEN, Guo, ZHAO, Wen, Jian Huang, KOIZUMI, Satoshi, KOIDE, Yasuo, LIAO, Meiyong. Disclosing surface adsorptions of oxygen- and hydrogen-terminated diamond via MEMS. 第38回ダイヤモンドシンポジウム. 2024 Open Access
- ZHAO, Wen, 顧 克云, CHEN, Guo, ZHANG, Zilong, KOIZUMI, Satoshi, KOIDE, Yasuo, LIAO, Meiyong. Frequency Stability of Higher Order Modes Diamond MEMS Resonator. 第38回ダイヤモンドシンポジウム. 2024 Open Access
- 顧 克云, ZHANG, Zilong, ZHAO, Wen, CHEN, Guo, Jian Huang, KOIZUMI, Satoshi, KOIDE, Yasuo, LIAO, Meiyong. Effect of Oxygen Terminal Surface Adsorption Layer on Energy Dissipation in Single-Crystal Diamond MEMS. 第85回応用物理学会秋季学術講演会. 2024 Open Access
- 顧 克云, ZHANG, Zilong, CHEN, Guo, SANG, Liwen, Jian Huang, KOIDE, Yasuo, LIAO, Meiyong. Ultrahigh Responsivity of Diamond-based Solar-blind Photodetectors Using Hydrogen Plasma Treatment. 19th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2024) . 2024 Open Access
- CHEN, Guo, ZHANG, Zilong, 顧 克云, SANG, Liwen, KOIZUMI, Satoshi, 戸田雅也, KOIDE, Yasuo, Zhaohui Huang, LIAO, Meiyong. High-order resonance of single-crystal diamond MEMS with high-quality factor at high temperatures. 19th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2024) . 2024
- ZHANG, Zilong, 顧 克云, CHEN, Guo, KOIDE, Yasuo, KOIZUMI, Satoshi, LIAO, Meiyong. Diamond NEMS Resonators for Real-Time Dual Sensing of Magnetic Fields and Temperatures up to 500℃. 19th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2024) . 2024
- ZHANG, Zilong, 顧 克云, CHEN, Guo, SANG, Liwen, KOIDE, Yasuo, KOIZUMI, Satoshi, LIAO, Meiyong. Diamond MEMS resonators for real-time dual sensing of magnetic fields and temperatures up to 300℃. 2024年第71回応用物理学会春季学術講演会. 2024
- CHEN, Guo, ZHANG, Zilong, 顧 克云, SANG, Liwen, KOIZUMI, Satoshi, KOIDE, Yasuo, Zhaohui Huang, LIAO, Meiyong. Air Damping Effect on Quality-Factor in High-Order Resonance Modes of Single-Crystal Diamond Microcantilevers. 2024年第71回応用物理学会春季学術講演会. 2024
- ZHANG, Zilong, 顧 克云, CHEN, Guo, KOIDE, Yasuo, KOIZUMI, Satoshi, LIAO, Meiyong. Diamond microresonators with on-chip actuation and sensing for magnetic sensing at high temperatures. The International Conference on the Science and Technology for Advanced Ceramics (STAC) 2024. 2024
- CHEN, Guo, ZHANG, Zilong, 顧 克云, SANG, Liwen, KOIZUMI, Satoshi, KOIDE, Yasuo, Zhaohui Huang, LIAO, Meiyong. Smart-Cut Method for Diamond NEMS Fabrication by Efficient Oxygen Etching. The International Conference on the Science and Technology for Advanced Ceramics (STAC) 2024. 2024
- LIAO, Meiyong, ZHANG, Zilong, サン フアンイン, KOIZUMI, Satoshi, KOIDE, Yasuo, ウ ハイファ, CHEN, Guo. High-reliability diamond MEMS: from concept to sensing applications. The International Conference on the Science and Technology for Advanced Ceramics (STAC) 2024. 2024
2023
- 廖 梅勇, ジャン ジロン, 陳 果, 小出 康夫, 戸田 雅也, 小泉 聡. オンチップダイヤモンドMEMS 磁気トランスデューサ. 第37回ダイヤモンドシンポジウム. 2023
- CHEN, Guo, ZHANG, Zilong, 顧 克云, KOIZUMI, Satoshi, Zhaohui Huang, LIAO, Meiyong. Effect of Energy Dissipation in Higher-Order Resonance on SCD MEMS Cantilevers Toward High f·Q. 2023年第84回応用物理学会秋季学術講演会. 2023
- ZHANG, Zilong, CHEN, Guo, 顧 克云, KOIDE, Yasuo, KOIZUMI, Satoshi, LIAO, Meiyong. Effect of magnetostrictive film thickness for enhancing magnetic sensing performance of diamond MEMS resonator. 2023年第84回応用物理学会秋季学術講演会. 2023
- ZHANG, Zilong, CHEN, Guo, Guangchao Chen, KOIZUMI, Satoshi, KOIDE, Yasuo, LIAO, Meiyong. ON-CHIP DIAMOND MEMS RESONATORS MAGNETIC SENSING UP TO 500℃. The 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2023). 2023
- CHEN, Guo, ZHANG, Zilong, SANG, Liwen, KOIDE, Yasuo, KOIZUMI, Satoshi, Zhaohui Huang, LIAO, Meiyong. Sensing the point defects by single-crystal diamond MEMS resonators. The 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2023). 2023
- ZHANG, Zilong, CHEN, Guo, SANG, Liwen, KOIDE, Yasuo, KOIZUMI, Satoshi, LIAO, Meiyong. High-temperature diamond MEMS magnetic sensor with on-chip actuation and sensing. 第70回応用物理学会春季学術講演会. 2023
- CHEN, Guo, ZHANG, Zilong, SANG, Liwen, KOIDE, Yasuo, KOIZUMI, Satoshi, LIAO, Meiyong. Effect of Ultra-High Vacuum Annealing and Hydrogen Plasma Treatment on the Resonance Properties of Single-Crystal Diamond MEMS Cantilevers. 2023年第70回応用物理学会春季学術講演会. 2023
その他の文献 TSV
2024
- Zilong Zhang, Keyun Gu, Guo Chen, Yasuo Koide, Satoshi Koizumi, Meiyong Liao. Diamond NEMS Resonators for Real-Time Dual Sensing of Magnetic Fields and Temperatures up to 500°C. 2024 IEEE 19th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS). 19 (2024) 1-5 10.1109/nems60219.2024.10639932 Open Access
