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NIMS Award Symposium 2026

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ON-CHIP DIAMOND MEMS RESONATORS MAGNETIC SENSING UP TO 500℃

ZHANG, Zilong, CHEN, Guo, Guangchao Chen, KOIZUMI, Satoshi, KOIDE, Yasuo, LIAO, Meiyong.
The 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2023). June 25, 2023-June 29, 2023.

NIMS author(s)

Fulltext and dataset(s) on Materials Data Repository (MDR)

    Created at: 2023-07-19 10:52:07 +0900 Updated at: 2023-07-19 10:52:07 +0900

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