- Address
- 305-0044 茨城県つくば市並木1-1 [アクセス]
研究内容
- Keywords
Wide band-gap semiconductor, Diamond, N/MEMS, Magnetic sensor
出版物原則として、2004年以降のNIMS所属における研究成果や出版物を表示しています。
論文
- Zilong Zhang, Wen Zhao, Guo Chen, Masaya Toda, Satoshi Koizumi, Yasuo Koide, Meiyong Liao. On‐chip Diamond MEMS Magnetic Sensing through Multifunctionalized Magnetostrictive Thin Film. Advanced Functional Materials. 33 [27] (2023) 10.1002/adfm.202300805
- Keyun Gu, Zilong Zhang, Ke Tang, Jian Huang, Meiyong Liao, Linjun Wang. Effects of sputtering pressure and oxygen partial pressure on amorphous Ga2O3 film-based solar-blind ultraviolet photodetectors. Applied Surface Science. 605 (2022) 154606 10.1016/j.apsusc.2022.154606
- Zilong Zhang, Liwen Sang, Jian Huang, Linjun Wang, Yasuo Koide, Satoshi Koizumi, Meiyong Liao. Enhancement of magnetic sensing performance of diamond resonators coupling with magnetic-strictive FeGa films by various interlayers. Carbon. 200 (2022) 401-409 10.1016/j.carbon.2022.08.086
会議録
- Z. Zhang, L. Sang, H. Wu, J. Huang, L. Wang, S. Koizumi, Y. Kodie, M. Liao. Galfenol-Ti-Diamond Multilayer MEMS Resonator for Magnetic Sensor Working up to 773 K. IEEE International Electron Devices Meeting (IEDM). (2019) 10.1109/iedm19573.2019.8993533
口頭発表
- ZHANG, Zilong, 陳 果, 顧 克云, KOIDE, Yasuo, KOIZUMI, Satoshi, LIAO, Meiyong. Effect of magnetostrictive film thickness for enhancing magnetic sensing performance of diamond MEMS resonator. 2023年第84回応用物理学会秋季学術講演会. 2023
- 陳 果, ZHANG, Zilong, 顧 克云, KOIZUMI, Satoshi, Zhaohui Huang, LIAO, Meiyong. Effect of Energy Dissipation in Higher-Order Resonance on SCD MEMS Cantilevers Toward High f·Q. 2023年第84回応用物理学会秋季学術講演会. 2023
- 陳 果, ZHANG, Zilong, SANG, Liwen, KOIDE, Yasuo, KOIZUMI, Satoshi, Zhaohui Huang, LIAO, Meiyong. Sensing the point defects by single-crystal diamond MEMS resonators. The 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2023). 2023
所属学会
Japanese Society of Applied Physics
受賞履歴
- Young Scholar Award in 15th International Conference on New Diamond and Nano Carbons 2020 (2022)