- Address
- 305-0044 茨城県つくば市並木1-1 [アクセス]
研究内容
- Keywords
M/NEMS, electronics, photoelectronics, devices and their physics, diamond, carbon
Establishment of the fabrication process for M/NEMS with diamond and related materials ; Creation of novel M/NEMS devices concepts; Development of high-performance electronic and photoelectronic devices; Understanding of the device physics behind the above devices
出版物2004年以降のNIMS所属における研究成果や出版物を表示しています。
論文
- 廖 梅勇, ジャン ジロン, 小出 康夫, 小泉 聡. ダイヤモンド MEMS磁気センサ. New diamond. (2020) 21-23
- Yuanzhao Wu, Yiwei Liu, Youlin Zhou, Qikui Man, Chao Hu, Waqas Asghar, Fali Li, Zhe Yu, Jie Shang, Gang Liu, LIAO, Meiyong, Runwei Li. A skin-inspired tactile sensor for smart prosthetics. SCIENCE ROBOTICS. 3 [22] (2018) eaat0429-1-eaat0429-8
- Haruka Matsuura, Takeyoshi Onuma, Masatomo Sumiya, Tomohiro Yamaguchi, Bing Ren, Meiyong Liao, Tohru Honda, Liwen Sang. MOCVD Growth and Investigation of InGaN/GaN Heterostructure Grown on AlGaN/GaN-on-Si Template. Applied Sciences. 9 [9] (2019) 1746 10.3390/app9091746
書籍
- LIAO, Meiyong, Bo Shen, Zhanguo Wang. Ultra-wide Bandgap Semiconductor Materials. Elsevier, 2019
- LIAO, Meiyong, KOIDE, Yasuo, SANG, Liwen. Single Crystal Diamond Micromechanical and Nanomechanical Resonators. Springer International Publishing, 2019
- LIAO, Meiyong, Xiaohui Chang, Zhangcheng Liu, Hongxing Wang, KOIDE, Yasuo. Solar-blind deep-ultraviolet detectors. Elsevier, 2019
会議録
- Z. Zhang, L. Sang, H. Wu, J. Huang, L. Wang, S. Koizumi, Y. Kodie, M. Liao. Galfenol-Ti-Diamond Multilayer MEMS Resonator for Magnetic Sensor Working up to 773 K. IEEE International Electron Devices Meeting (IEDM). 2019
- Ioana Voiculescu, Masaya Toda, Meiyong Liao, Takahito Ono. Pico-thermogravimetric material properties analysis using diamond cantilever beam. Proceedings of Transducers 2017. 2017
- IMURA, Masataka, BANAL, Ganipan Ryan, LIAO, Meiyong, LIU, Jiangwei, AIZAWA, Takashi, TANAKA, Akihiro, IWAI, Hideo, MANO, Takaaki, KOIDE, Yasuo. Effect of off-cut angle of hydrogen-terminated diamond(111) substrate on the quality of AlN towards high-density AlN/diamond(111). DIAMOND AND RELATED MATERIALS. 2017, -
口頭発表
- LIAO, Meiyong. Diamond Electronics and MEMS. International Symposium on Diamond and Super Hard Materials 2020/ http://www.idacn.org/news/41092.html. 2020
- ジャン ジロン, SANG, Liwen, ウ ハイファ, Jian Huang, Linjun Wang, KOIZUMI, Satoshi, KOIDE, Yasuo, LIAO, Meiyong. Galfenol-Ti-Diamond Multilayer MEMS Resonator for Magnetic Sensor Working up to 500oC . 2019 IEEE International Electron Devices Meeting (IEDM). 2019
- LIAO, Meiyong, SANG, Liwen, KOIZUMI, Satoshi, IMURA, Masataka, KOIDE, Yasuo. On-chip Single Crystal Diamond MEMS. 第３３回ダイヤモンドシンポジウム講演プログラム. 2019
その他の文献
- 廖 梅勇, ジャン ジロン, 小出 康夫, 小泉 聡. ダイヤモンド MEMS磁気センサ. New diamond. (2020) 21-23
- IMURA, Masataka, LIAO, Meiyong, KOIDE, Yasuo. 窒化アルミニウム／ダイヤモンドヘテロ接合を用いた電界効果トランジスタ. NEW DIAMOND. 28 [2] (2012) 36-38
- KOIDE, Yasuo, LIAO, Meiyong, Jose Alvarez. ダイヤモンドを用いた光センサの開発. 月刊マテリアルインテグレーション. 21 [12] (2008) 1-7
特許
- 特許第4123496号 ダイヤモンド紫外光センサー (2008)
- 特許第5158777号 ダイヤモンド半導体整流素子 (2012)
- 特許第4650491号 ダイヤモンド紫外光センサー (2010)
所属学会
応用物理学会 (2004)
受賞履歴
- Outstanding poster award, 2nd conference on NDNC2008 (New Diamond and Nano Carbons) ()