研究内容
- Keywords
ダイヤモンド基板上のMEMS/NEMSデバイス
出版物2004年以降のNIMS所属における研究成果や出版物を表示しています。
論文
- Guo Chen, Satoshi Koizumi, Yasuo Koide, Meiyong Liao. Low-Energy Dissipation Diamond MEMS. Accounts of Materials Research. 5 [9] (2024) 1087-1096 10.1021/accountsmr.4c00139 Open Access
- Guo Chen, Zilong Zhang, Keyun Gu, Liwen Sang, Satoshi Koizumi, Masaya Toda, Haitao Ye, Yasuo Koide, Zhaohui Huang, Meiyong Liao. Higher-order resonance of single-crystal diamond cantilever sensors toward high f‧Q products. Applied Physics Express. 17 [2] (2024) 021001 10.35848/1882-0786/ad2027 Open Access
- Guo Chen, Zilong Zhang, Yasuo Koide, Satoshi Koizumi, Zhaohui Huang, Meiyong Liao. Disclosing the annihilation effect of ion-implantation induced defects in single-crystal diamond by resonant MEMS. Diamond and Related Materials. 138 (2023) 110240 10.1016/j.diamond.2023.110240 Open Access
会議録
- Guo Chen, Zilong Zhang, Keyun Gu, Liwen Sang, Satoshi Koizumi, Masaya Toda, Yasuo Koide, Zhaohui Huang, Meiyong Liao. High-order resonance of single-crystal diamond MEMS with high-quality factor at high temperatures. 2024 IEEE 19th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS). (2024) 1-4 10.1109/nems60219.2024.10639909
- Zilong Zhang, Keyun Gu, Guo Chen, Yasuo Koide, Satoshi Koizumi, Meiyong Liao. Diamond NEMS Resonators for Real-Time Dual Sensing of Magnetic Fields and Temperatures up to 500°C. 2024 IEEE 19th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS). (2024) 1-5 10.1109/nems60219.2024.10639932
- Keyun Gu, Zilong Zhang, Guo Chen, Liwen Sang, Jian Huang, Yasuo Koide, Meiyong Liao. Ultrahigh Responsivity of Diamond-based Solar-blind Photodetectors Using Hydrogen Plasma Treatment. 2024 IEEE 19th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS). (2024) 1-4 10.1109/nems60219.2024.10639852
口頭発表
- CHEN, Guo, ZHANG, Zilong, SANG, Liwen, KOIDE, Yasuo, KOIZUMI, Satoshi, Zhaohui Huang, LIAO, Meiyong. Sensing the point defects by single-crystal diamond MEMS resonators. The 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2023). 2023
- CHEN, Guo, ZHANG, Zilong, 顧 克云, SANG, Liwen, KOIZUMI, Satoshi, 戸田雅也, KOIDE, Yasuo, Zhaohui Huang, LIAO, Meiyong. High-order resonance of single-crystal diamond MEMS with high-quality factor at high temperatures. 19th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2024) . 2024
- CHEN, Guo, ZHAO, Wen, 顧 克云, KOIZUMI, Satoshi, KOIDE, Yasuo, LIAO, Meiyong. High Quality Factor Single-Crystal Diamond NEMS Cantilevers Fabricated by A Smart-Cut Method. The 18th International Conference on New Diamond and Nano Carbons (NDNC 2025). 2025 Open Access
その他の文献
- Zilong Zhang, Keyun Gu, Guo Chen, Yasuo Koide, Satoshi Koizumi, Meiyong Liao. Diamond NEMS Resonators for Real-Time Dual Sensing of Magnetic Fields and Temperatures up to 500°C. 2024 IEEE 19th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS). 19 (2024) 1-5 10.1109/nems60219.2024.10639932 Open Access
所属学会
応用物理学会
受賞履歴
- Excellent Poster Award at the 4th International Postgraduates Seminar on Refractories (2021)
外部資金獲得履歴
- 日本学術振興会 特別研究員奨励費 JSPS Fellow (2025)
この機能は所内限定です。
この機能は所内限定です。