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Electrical Readout of Single-Crystal Diamond MEMS Resonators for Infrared Sensing
2026年 第87回応用物理学会秋季学術講演会. September 08, 2026-September 11, 2026.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2026-10-14 04:52:25 +0900 Updated at: 2026-10-14 04:52:25 +0900