HOME > Article > DetailEffect of defects on Q factors of single-crystal diamond MEMS resonatorsZilong Zhang, Guo Chen, Keyun Gu, Satoshi Koizumi, Meiyong Liao. Functional Diamond 3 [1] 2221280. 2023.https://doi.org/10.1080/26941112.2023.2221280 Open Access Informa UK Limited (Publisher) Materials Data Repository (MDR) NIMS author(s)CHEN, GuoKOIZUMI, SatoshiLIAO, MeiyongFulltext and dataset(s) on Materials Data Repository (MDR)MDRavailable Effect of defects on Q factors of single-crystal diamond MEMS resonators Created at: 2023-11-16 03:14:21 +0900 Updated at: 2026-10-30 09:47:19 +0900