High-reliability diamond MEMS: from concept to sensing applications

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LIAO, Meiyong, ZHANG, Zilong, サンフアンイン, KOIZUMI, Satoshi, KOIDE, Yasuo, ウハイファ, 陳果.

The International Conference on the Science and Technology for Advanced Ceramics (STAC) 2024. 2024-02-29.

作成時刻: 2024-03-02 03:11:54 +0900更新時刻: 2024-03-02 03:11:54 +0900