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Effect of Energy Dissipation in Higher-Order Resonance on SCD MEMS Cantilevers Toward High f·Q
2023年第84回応用物理学会秋季学術講演会. September 19, 2023-September 23, 2023.
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Created at: 2023-09-27 03:21:26 +0900 Updated at: 2023-09-27 03:21:26 +0900