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Smart-Cut Method for Diamond NEMS Fabrication by Efficient Oxygen Etching

CHEN, Guo, ZHANG, Zilong, 顧 克云, SANG, Liwen, KOIZUMI, Satoshi, KOIDE, Yasuo, Zhaohui Huang, LIAO, Meiyong.
The International Conference on the Science and Technology for Advanced Ceramics (STAC) 2024. 2024-02-29.

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    Created at: 2024-03-02 03:11:54 +0900 Updated at: 2024-03-02 03:11:54 +0900

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