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High-order resonance of single-crystal diamond MEMS with high-quality factor at high temperatures

CHEN, Guo, ZHANG, Zilong, 顧克云, SANG, Liwen, KOIZUMI, Satoshi, 戸田雅也, KOIDE, Yasuo, Zhaohui Huang, LIAO, Meiyong.

19th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2024) . May 02, 2024-May 05, 2024.

NIMS author(s)

Fulltext and dataset(s) on Materials Data Repository (MDR)

MDRavailable High-order resonance of single-crystal diamond MEMS with high-quality factor at high temperatures

Created at: 2024-05-09 03:12:30 +0900 Updated at: 2024-05-09 03:12:30 +0900

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