High-order resonance of single-crystal diamond MEMS with high-quality factor at high temperatures | SAMURAI, NIMS Researchers Directory Service

HOME > Proceedings > Detail

High-order resonance of single-crystal diamond MEMS with high-quality factor at high temperatures

Guo Chen, Zilong Zhang, Keyun Gu, Liwen Sang, Satoshi Koizumi, Masaya Toda, Yasuo Koide, Zhaohui Huang, Meiyong Liao.

2024 IEEE 19th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) 1-4. 2024.

https://doi.org/10.1109/nems60219.2024.10639909

Open Access Materials Data Repository (MDR)

NIMS author(s)

Fulltext and dataset(s) on Materials Data Repository (MDR)

MDRavailable High-order resonance of single-crystal diamond MEMS with high-quality factor at high temperatures

Created at: 2024-10-22 19:35:04 +0900 Updated at: 2026-10-08 09:07:19 +0900

▲ Go to the top of this page