HOME > 会議録 > 書誌詳細High-order resonance of single-crystal diamond MEMS with high-quality factor at high temperaturesGuo Chen, Zilong Zhang, Keyun Gu, Liwen Sang, Satoshi Koizumi, Masaya Toda, Yasuo Koide, Zhaohui Huang, Meiyong Liao. 2024 IEEE 19th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) 1-4. 2024.https://doi.org/10.1109/nems60219.2024.10639909 Open Access Materials Data Repository (MDR) NIMS著者小泉 聡小出 康夫廖 梅勇Materials Data Repository (MDR)上の本文・データセットMDRavailable High-order resonance of single-crystal diamond MEMS with high-quality factor at high temperatures 作成時刻: 2024-10-22 19:35:04 +0900更新時刻: 2024-11-14 08:49:13 +0900
