| 37件の論文が見つかりました。論文は出版年月日順に表示しています。（ヘルプ） | |
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| Erika Maeda, Toshihide Nabatame, Masafumi Hirose, Mari Inoue, Akihiko Ohi, Naoki Ikeda, Hajime Kiyono. Correlation between SiO2 growth rate and difference in electronegativity of metal–oxide underlayers for plasma enhanced atomic layer deposition using tris(dimethylamino)silane precursor. Journal of Vacuum Science & Technology A. 38 [3] (2020) 032409 10.1116/6.0000078 | |
| Mineharu Suzuki, Hiroko Nagao, Yoshitomo Harada, Hiroshi Shinotsuka, Katsumi Watanabe, Akito Sasaki, Asahiko Matsuda, Koji Kimoto, Hideki Yoshikawa. Raw-to-repository characterization data conversion for repeatable, replicable, and reproducible measurements. Journal of Vacuum Science & Technology A. 38 [2] (2020) 023204 10.1116/1.5128408 Open Access | |
| Fumikazu Mizutani, Shintaro Higashi, Mari Inoue, Toshihide Nabatame. Atomic layer deposition of high purity Ga2O3 films using liquid pentamethylcyclopentadienyl gallium and combinations of H2O and O2 plasma. Journal of Vacuum Science & Technology A. 38 [2] (2020) 022412 10.1116/1.5134738 | |
| Takashi Aizawa, Isao Ohkubo, Mariana S. L. Lima, Takeaki Sakurai, Takao Mori. Fabrication of Mg2Sn(111) film by molecular beam epitaxy. Journal of Vacuum Science & Technology A. 37 [6] (2019) 061513 10.1116/1.5122844 Open Access | |
| Masuaki Matsumoto, Tomohiro Okada, Tetsuya Miyazawa, Kazuhiko Mase, Misao Yamanaka, Ayako Hashimoto, Markus Wilde, Katsuyuki Fukutani. Hydrogen incorporation and release from nonevaporable getter coatings based on oxygen-free Pd/Ti thin films. Journal of Vacuum Science & Technology A. 37 [5] (2019) 051601 10.1116/1.5108983 | |
| Tetsuya Miyazawa, Yu Kano, Yasuo Nakayama, Kenichi Ozawa, Toshiharu Iga, Misao Yamanaka, Ayako Hashimoto, Takashi Kikuchi, Kazuhiko Mase. Improved pumping speeds of oxygen-free palladium/titanium nonevaporable getter coatings and suppression of outgassing by baking under oxygen. Journal of Vacuum Science & Technology A. 37 [2] (2019) 021601 10.1116/1.5074160 Open Access | |
| Tetsuya Miyazawa, Masashi Kurihara, Shinya Ohno, Naoya Terashima, Yuto Natsui, Hiroo Kato, Yoshihiro Kato, Ayako Hashimoto, Takashi Kikuchi, Kazuhiko Mase. Oxygen-free palladium/titanium coating, a novel nonevaporable getter coating with an activation temperature of 133 °C. Journal of Vacuum Science & Technology A. 36 [5] (2018) 051601 10.1116/1.5037023 | |
| Tomomi Sawada, Toshihide Nabatame, Thang Duy Dao, Ippei Yamamoto, Kazunori Kurishima, Takashi Onaya, Akihiko Ohi, Kazuhiro Ito, Makoto Takahashi, Kazuyuki Kohama, Tomoji Ohishi, Atsushi Ogura, Tadaaki Nagao. Improvement of smooth surface of RuO2 bottom electrode on Al2O3 buffer layer and characteristics of RuO2/TiO2/Al2O3/TiO2/RuO2 capacitors. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 35 [6] (2017) 061503 10.1116/1.4998425 | |
| Taku T. Suzuki, Isao Sakaguchi. Analysis of trace n-alkane in air by cryogenic-temperature programmed desorption. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 35 [4] (2017) 041401 10.1116/1.4982930 | |
| Takashi Aizawa, Shigeki Otani, Isao Ohkubo, Takao Mori. ZrC epitaxy on Si(111). Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 33 [6] (2015) 061512 10.1116/1.4930317 | |
