HOME > Article > DetailTi/Pt/Au ohmic contacts to β-Ga2O3Takayoshi Oshima, Yuichi Oshima. Journal of Vacuum Science & Technology A 44 [6] 063207. 2026.https://doi.org/10.1116/6.0005829 Open Access American Vacuum Society (Publisher) Materials Data Repository (MDR) NIMS author(s)OSHIMA, TakayoshiOSHIMA, YuichiFulltext and dataset(s) on Materials Data Repository (MDR)MDRavailable Ti/Pt/Au ohmic contacts to β-Ga2O3 Created at: 2026-10-24 03:06:08 +0900 Updated at: 2026-10-25 03:06:45 +0900
