Raw-to-repository characterization data conversion for repeatable, replicable, and reproducible measurements

著者	Mineharu Suzuki, Hiroko Nagao, Yoshitomo Harada, Hiroshi Shinotsuka, Katsumi Watanabe, Akito Sasaki, Asahiko Matsuda, Koji Kimoto, Hideki Yoshikawa.
掲載誌名	Journal of Vacuum Science & Technology A 38 [2] 023204 ISSN: 07342101, 15208559 ESIでのカテゴリ: MATERIALS SCIENCE
出版社	American Vacuum Society
発表年	2020
言語	English
DOI	https://doi.org/10.1116/1.5128408
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