HOME > 論文 > 書誌詳細Atomic layer deposition of ZnO thin films using a liquid cyclopentadienyl-based precursorFumikazu Mizutani, Makoto Mizui, Nobutaka Takahashi, Mari Inoue, Toshihide Nabatame. Journal of Vacuum Science & Technology A 42 [2] 022403. 2024.https://doi.org/10.1116/6.0003178 NIMS著者生田目 俊秀Materials Data Repository (MDR)上の本文・データセット作成時刻: 2024-02-28 03:10:51 +0900更新時刻: 2024-09-05 10:39:45 +0900
