HOME > Article > DetailAtomic layer deposition of ZnO thin films using a liquid cyclopentadienyl-based precursorFumikazu Mizutani, Makoto Mizui, Nobutaka Takahashi, Mari Inoue, Toshihide Nabatame. Journal of Vacuum Science & Technology A 42 [2] 022403. 2024.https://doi.org/10.1116/6.0003178 NIMS author(s)NABATAME, ToshihideFulltext and dataset(s) on Materials Data Repository (MDR)Created at: 2024-02-28 03:10:51 +0900Updated at: 2024-09-05 10:39:45 +0900
