| 185 article(s) found. Sorted by publication dates. (Help) | |
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| Haoming Che, Takashi Onaya, Atsushi Tamura, Masaki Ishii, Hiroshi Taka, Koji Kita. Effects of oxidant selection for atomic layer deposition on impurity removal and crystallinity of as-grown Hf1−
x
Zr
x
O2 thin films. Journal of Vacuum Science & Technology A. 44 [3] (2026) 030402 10.1116/6.0005362 Open Access | |
| Shuai Tang, Jie Tang, Yimeng Wu, You-Hu Chen, Jun Uzuhashi, Tadakatsu Ohkubo, Masaki Takeguchi, Lu-Chang Qin. Stable and high current emission of electrons from a HfC nanoneedle field-emitter fabricated by focused ion beam. Vacuum. 238 (2025) 114224 10.1016/j.vacuum.2025.114224 Open Access | |
| Akiko N. Itakura, Naoya Miyauchi, Masahiro Kitajima, Taro Yakabe, Hajime Yoshida. Visualizing micro leakage position by dynamic measurement in operando hydrogen microscope. Vacuum. 228 (2024) 113471 10.1016/j.vacuum.2024.113471 Open Access | |
| Akihiro Ohtake, Takuya Kawazu, Takaaki Mano. Arsenic-flux dependence of surface morphology in InAs homoepitaxy. Journal of Vacuum Science & Technology A. 42 [6] (2024) 062702 10.1116/6.0003957 Open Access | |
| Fumikazu Mizutani, Makoto Mizui, Nobutaka Takahashi, Mari Inoue, Toshihide Nabatame. Atomic layer deposition of ZnO thin films using a liquid cyclopentadienyl-based precursor. Journal of Vacuum Science & Technology A. 42 [2] (2024) 022403 10.1116/6.0003178 | |
| Naoya Miyauchi, Taro Yakabe, Yoshiharu Murase, Masahiro Kitajima, Shoji Takagi, Akiko N. Itakura. Apparatus design of operando hydrogen microscope for visualization of time-dependent distribution of hydrogen. Journal of Vacuum Science & Technology A. 42 [1] (2024) 013201 10.1116/6.0003153 Open Access | |
| Yuta Sato, Takashi Kikuchi, Tetsuya Miyazawa, Shinya Ohno, Ayako Hashimoto, Misao Yamanaka, Kazuhiko Mase. Zero-length conflat fin-type nonevaporable getter pump deposited with oxygen-free palladium/titanium. Vacuum. 212 (2023) 112004 10.1016/j.vacuum.2023.112004 Open Access | |
| M.S.S. Khan, S.F. Mao, Y.B. Zou, D.B. Lu, B. Da, Y.G. Li, Z.J. Ding. An extensive theoretical quantification of secondary electron emission from silicon. Vacuum. 215 (2023) 112257 10.1016/j.vacuum.2023.112257 | |
| Zhuoqun Wen, Kamruzzaman Khan, Kai Sun, Ruby Wellen, Yuichi Oshima, Elaheh Ahmadi. Thermal stability of HVPE-grown (0001) α-Ga2O3 on sapphire template under vacuum and atmospheric environments. Journal of Vacuum Science & Technology A. 41 [4] (2023) 043403 10.1116/6.0002559 | |
| George H. Major, Joshua W. Pinder, Daniel E. Austin, Donald R. Baer, Steven L. Castle, Jan Čechal, B. Maxwell Clark, Hagai Cohen, Jonathan Counsell, Alberto Herrera-Gomez, Pavitra Govindan, Seong H. Kim, David J. Morgan, Robert L. Opila, Cedric J. Powell, Stanislav Průša, Adam Roberts, Mario Rocca, Naoto Shirahata, Tomáš Šikola, Emily F. Smith, Regina C. So, John E. Stovall, Jennifer Strunk, Andrew Teplyakov, Jeff Terry, Stephen G. Weber, Matthew R. Linford. Perspective on improving the quality of surface and material data analysis in the scientific literature with a focus on x-ray photoelectron spectroscopy (XPS). Journal of Vacuum Science & Technology A. 41 [3] (2023) 038501 10.1116/6.0002437 | |
