Zero-length conflat fin-type nonevaporable getter pump deposited with oxygen-free palladium/titanium | SAMURAI, NIMS Researchers Directory Service

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Zero-length conflat fin-type nonevaporable getter pump deposited with oxygen-free palladium/titanium

Yuta Sato, Takashi Kikuchi, Tetsuya Miyazawa, Shinya Ohno, Ayako Hashimoto, Misao Yamanaka, Kazuhiko Mase.

Vacuum 212 112004. 2023.

https://doi.org/10.1016/j.vacuum.2023.112004

Open Access Elsevier BV (Publisher)

NIMS author(s)

HASHIMOTO, Ayako

Fulltext and dataset(s) on Materials Data Repository (MDR)

Created at: 2024-05-31 03:17:48 +0900 Updated at: 2026-10-29 05:57:39 +0900

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