| 186 article(s) found. Sorted by publication dates. (Help) | |
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| Takayoshi Oshima, Yuichi Oshima. Ti/Pt/Au ohmic contacts to β-Ga2O3. Journal of Vacuum Science & Technology A. 44 [6] (2026) 063207 10.1116/6.0005829 Open Access | |
| Haoming Che, Takashi Onaya, Atsushi Tamura, Masaki Ishii, Hiroshi Taka, Koji Kita. Effects of oxidant selection for atomic layer deposition on impurity removal and crystallinity of as-grown Hf1−
x
Zr
x
O2 thin films. Journal of Vacuum Science & Technology A. 44 [3] (2026) 030402 10.1116/6.0005362 Open Access | |
| Shuai Tang, Jie Tang, Yimeng Wu, You-Hu Chen, Jun Uzuhashi, Tadakatsu Ohkubo, Masaki Takeguchi, Lu-Chang Qin. Stable and high current emission of electrons from a HfC nanoneedle field-emitter fabricated by focused ion beam. Vacuum. 238 (2025) 114224 10.1016/j.vacuum.2025.114224 Open Access | |
| Akiko N. Itakura, Naoya Miyauchi, Masahiro Kitajima, Taro Yakabe, Hajime Yoshida. Visualizing micro leakage position by dynamic measurement in operando hydrogen microscope. Vacuum. 228 (2024) 113471 10.1016/j.vacuum.2024.113471 Open Access | |
| Akihiro Ohtake, Takuya Kawazu, Takaaki Mano. Arsenic-flux dependence of surface morphology in InAs homoepitaxy. Journal of Vacuum Science & Technology A. 42 [6] (2024) 062702 10.1116/6.0003957 Open Access | |
| Fumikazu Mizutani, Makoto Mizui, Nobutaka Takahashi, Mari Inoue, Toshihide Nabatame. Atomic layer deposition of ZnO thin films using a liquid cyclopentadienyl-based precursor. Journal of Vacuum Science & Technology A. 42 [2] (2024) 022403 10.1116/6.0003178 | |
| Naoya Miyauchi, Taro Yakabe, Yoshiharu Murase, Masahiro Kitajima, Shoji Takagi, Akiko N. Itakura. Apparatus design of operando hydrogen microscope for visualization of time-dependent distribution of hydrogen. Journal of Vacuum Science & Technology A. 42 [1] (2024) 013201 10.1116/6.0003153 Open Access | |
| Yuta Sato, Takashi Kikuchi, Tetsuya Miyazawa, Shinya Ohno, Ayako Hashimoto, Misao Yamanaka, Kazuhiko Mase. Zero-length conflat fin-type nonevaporable getter pump deposited with oxygen-free palladium/titanium. Vacuum. 212 (2023) 112004 10.1016/j.vacuum.2023.112004 Open Access | |
| M.S.S. Khan, S.F. Mao, Y.B. Zou, D.B. Lu, B. Da, Y.G. Li, Z.J. Ding. An extensive theoretical quantification of secondary electron emission from silicon. Vacuum. 215 (2023) 112257 10.1016/j.vacuum.2023.112257 | |
| Zhuoqun Wen, Kamruzzaman Khan, Kai Sun, Ruby Wellen, Yuichi Oshima, Elaheh Ahmadi. Thermal stability of HVPE-grown (0001) α-Ga2O3 on sapphire template under vacuum and atmospheric environments. Journal of Vacuum Science & Technology A. 41 [4] (2023) 043403 10.1116/6.0002559 | |
