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分野別にみる

機構に所属する研究者の発表した論文を、タイトル・抄録・分野などから検索することができます。論文の分野はクラリベイト社のESI分類を参考に分類しています(Materials Science, Physics, Chemistry, Engineering, Biologyなど)。

最終更新日: 2022年07月02日

10件の論文が見つかりました。論文は出版年月日順に表示しています。(ヘルプ)
  • Masafumi Hirose, Toshihide Nabatame, Kazuya Yuge, Erika Maeda, Akihiko Ohi, Naoki Ikeda, Yoshihiro Irokawa, Hideo Iwai, Hideyuki Yasufuku, Satoshi Kawada, Makoto Takahashi, Kazuhiro Ito, Yasuo Koide, Hajime Kiyono. Influence of post-deposition annealing on characteristics of Pt/Al2O3/β-Ga2O3 MOS capacitors. Microelectronic Engineering. 216 (2019) 111040 10.1016/j.mee.2019.111040
  • Erika Maeda, Toshihide Nabatame, Kazuya Yuge, Masafumi Hirose, Mari Inoue, Akihiko Ohi, Naoki Ikeda, Koji Shiozaki, Hajime Kiyono. Change of characteristics of n-GaN MOS capacitors with Hf-rich HfSiOx gate dielectrics by post-deposition annealing. Microelectronic Engineering. 216 (2019) 111036 10.1016/j.mee.2019.111036
  • Takashi Onaya, Toshihide Nabatame, Naomi Sawamoto, Akihiko Ohi, Naoki Ikeda, Takahiro Nagata, Atsushi Ogura. Ferroelectricity of HfxZr1−xO2 thin films fabricated by 300 °C low temperature process with plasma-enhanced atomic layer deposition. Microelectronic Engineering. 215 (2019) 111013 10.1016/j.mee.2019.111013
  • Zhenxing Li, Thang Duy Dao, Tadaaki Nagao, Motoki Terano, Masahiko Yoshino. Fabrication of plasmonic nanopillar arrays based on nanoforming. Microelectronic Engineering. 139 (2015) 7-12 10.1016/j.mee.2015.04.086
  • Zhenxing Li, Thang Duy Dao, Tadaaki Nagao, Masahiko Yoshino. Optical properties of ordered Dot-on-Plate nano-sandwich arrays. Microelectronic Engineering. 127 (2014) 34-39 10.1016/j.mee.2014.03.045
  • Nao Shinoda, Tetsuya Shimizu, Tso-Fu Mark Chang, Akinobu Shibata, Masato Sone. Filling of nanoscale holes with high aspect ratio by Cu electroplating using suspension of supercritical carbon dioxide in electrolyte with Cu particles. Microelectronic Engineering. 97 (2012) 126-129 10.1016/j.mee.2012.02.031
  • Nobuyuki Yoshida, Toshikazu Tasaki, Tso-Fu Mark Chang, Akinobu Shibata, Chiemi Ishiyama, Masato Sone. Pd–Ni–P metallic glass pattern with controllable microstructure fabricated by electroless alloy plating. Microelectronic Engineering. 88 [8] (2011) 2401-2404 10.1016/j.mee.2011.02.081
  • Byung hoon Woo, Masato Sone, Shibata Akinobu, Chiemi Ishiyama, Kaoru Masuda, Masahiro Yamagata, Yakichi Higo. Metallization on polymer via quantitatively controlled catalyzation in Sc–CO2 and electroless plating with Sc–CO2 emulsion for micro and nano-device. Microelectronic Engineering. 86 [4-6] (2009) 1179-1182 10.1016/j.mee.2008.11.096
  • Toshiya Sakata, Izumi Makino, Sayaka Kita, Yuji Miyahara. Electrical detection of ovum membrane charges using biotransistor. Microelectronic Engineering. 85 [5-6] (2008) 1337-1340 10.1016/j.mee.2008.01.030
  • Parhat Ahmet, Takashi Shiozawa, Koji Nagahiro, Takahiro Nagata, Kuniyuki Kakushima, Kazuo Tsutsui, Toyohiro Chikyow, Hiroshi Iwai. Thermal stability of Ni silicide films on heavily doped n+ and p+ Si substrates. Microelectronic Engineering. 85 [7] (2008) 1642-1646 10.1016/j.mee.2008.04.001
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