HOME > 論文 > 書誌詳細Stability of Si impurity in high-k oxidesUMEZAWA, Naoto, Kenji Shiraishi, CHIKYOW, Toyohiro. MICROELECTRONIC ENGINEERING 1780-1781. 2009.NIMS著者知京 豊裕Materials Data Repository (MDR)上の本文・データセット作成時刻: 2022-10-21 23:02:04 +0900更新時刻: 2022-10-21 23:02:04 +0900
