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In situ voltage-application system for active voltage contrast imaging in helium ion microscope

著者Chikako Sakai, Nobuyuki Ishida, Shoko Nagano, Keiko Onishi, Daisuke Fujita.
掲載誌名Journal of Vacuum Science & Technology B 36 [4] 042903
出版社American Vacuum Society
発表年2018
言語English
DOIhttps://doi.org/10.1116/1.5031086
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