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In situ voltage-application system for active voltage contrast imaging in helium ion microscope

Author(s)Chikako Sakai, Nobuyuki Ishida, Shoko Nagano, Keiko Onishi, Daisuke Fujita.
Journal titleJournal of Vacuum Science & Technology B 36 [4] 042903
PublisherAmerican Vacuum Society
Year of publication2018
LanguageEnglish
DOIhttps://doi.org/10.1116/1.5031086
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