Structural change of Ga2O3 film on GaN(0001) substrate by atomic layer deposition and post-deposition annealing
| 著者 | SAWADA, Tomomi, NABATAME, Toshihide, Makoto Takahashi, Kazuhiro Ito, ONAYA, Takashi, IROKAWA, Yoshihiro, KOIDE, Yasuo, TSUKAGOSHI, Kazuhito. |
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| 会議名 | MNC2022, 35th International Microprocesses and Nanotechnology Conference |
| 発表年 | 2022 |
| 言語 | English |