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Structural change of Ga2O3 film on GaN(0001) substrate by atomic layer deposition and post-deposition annealing

MNC2022, 35th International Microprocesses and Nanotechnology Conference. 2022.

NIMS著者


Materials Data Repository (MDR)上の本文・データセット


    作成時刻: 2022-12-02 03:39:49 +0900更新時刻: 2022-12-02 03:39:49 +0900

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