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Structural change of Ga2O3 film on GaN(0001) substrate by atomic layer deposition and post-deposition annealing

SAWADA, Tomomi, NABATAME, Toshihide, Makoto Takahashi, Kazuhiro Ito, ONAYA, Takashi, IROKAWA, Yoshihiro, KOIDE, Yasuo, TSUKAGOSHI, Kazuhito.
MNC2022, 35th International Microprocesses and Nanotechnology Conference. November 08, 2022-November 11, 2022.

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Fulltext and dataset(s) on Materials Data Repository (MDR)

    Created at: 2022-12-02 03:39:49 +0900Updated at: 2022-12-02 03:39:49 +0900

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