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Comparison of Oxide TFT with C-doped and C-free In2O3 Channels by ALD

KOBAYASHI, Riku, NABATAME, Toshihide, 栗島 一徳, ONAYA, Takashi, OHI, Akihiko, IKEDA, Naoki, NAGATA, Takahiro, TSUKAGOSHI, Kazuhito, 小椋 厚志.
MANA INTERNATIONAL SYMPOSIUM 2020/https://www.nims.go.jp/mana/2020/. 2020.

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Materials Data Repository (MDR)上の本文・データセット

    作成時刻: 2020-03-07 03:00:21 +0900更新時刻: 2020-03-07 03:00:21 +0900

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