Influence of post-deposition annealing on electrical characteristics of Pt/Al2O3/β-Ga2O3 MOS capacitors
| 著者 | HIROSE, Masafumi, NABATAME, Toshihide, YUGE, Kazuya, MAEDA, Erika, OHI, Akihiko, IKEDA, Naoki, IROKAWA, Yoshihiro, IWAI, Hideo, 安福 秀幸, KAWADA, Satoshi, KOIDE, Yasuo. |
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| 会議名 | INFOS 2019 |
| 発表年 | 2019 |
| 言語 | English |