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Influence of post-deposition annealing on electrical characteristics of Pt/Al2O3/β-Ga2O3 MOS capacitors

HIROSE, Masafumi, NABATAME, Toshihide, YUGE, Kazuya, MAEDA, Erika, OHI, Akihiko, IKEDA, Naoki, IROKAWA, Yoshihiro, IWAI, Hideo, 安福 秀幸, KAWADA, Satoshi, KOIDE, Yasuo.
INFOS 2019. 2019.

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Fulltext and dataset(s) on Materials Data Repository (MDR)

    Created at: 2019-10-05 03:00:21 +0900Updated at: 2019-10-05 03:00:21 +0900

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