Molecular Structure of Sputtered Neutral Species with Cluster Ion
| 著者 | ONISHI, Keiko, NAGANO, Shoko, FUJITA, Daisuke, YAKABE, Taro, ITAKURA, Akiko. |
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| 会議名 | 14th International Symposium on Atomic Level Characterizations for New Materials and Devices '22 |
| 発表年 | 2022 |
| 言語 | English |