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Molecular Structure of Sputtered Neutral Species with Cluster Ion

ONISHI, Keiko, NAGANO, Shoko, FUJITA, Daisuke, YAKABE, Taro, ITAKURA, Akiko.
14th International Symposium on Atomic Level Characterizations for New Materials and Devices '22. 2022.

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Fulltext and dataset(s) on Materials Data Repository (MDR)

    Created at: 2022-11-15 03:26:20 +0900Updated at: 2022-11-15 03:26:20 +0900

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