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Interface characteristics of β-Ga2O3/Al2O3/Pt capacitors after postmetallization annealing

著者Masafumi Hirose, Toshihide Nabatame, Yoshihiro Irokawa, Erika Maeda, Akihiko Ohi, Naoki Ikeda, Liwen Sang, Yasuo Koide, Hajime Kiyono.
掲載誌名Journal of Vacuum Science & Technology A 39 [1] 012401
ISSN: 07342101, 15208559
ESIでのカテゴリ: MATERIALS SCIENCE
出版社American Vacuum Society
発表年2021
言語English
DOIhttps://doi.org/10.1116/6.0000626
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