Interface characteristics of β-Ga<sub>2</sub>O<sub>3</sub>/Al<sub>2</sub>O<sub>3</sub>/Pt capacitors after postmetallization annealing | 研究者総覧SAMURAI - 物質・材料研究機構 (NIMS)

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Interface characteristics of β-Ga₂O₃/Al₂O₃/Pt capacitors after postmetallization annealing

Masafumi Hirose, Toshihide Nabatame, Yoshihiro Irokawa, Erika Maeda, Akihiko Ohi, Naoki Ikeda, Liwen Sang, Yasuo Koide, Hajime Kiyono.

Journal of Vacuum Science & Technology A 39 [1] 012401. 2021.

https://doi.org/10.1116/6.0000626

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作成時刻: 2021-02-17 03:00:18 +0900 更新時刻: 2026-09-29 07:12:03 +0900

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