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Interface characteristics of β-Ga2O3/Al2O3/Pt capacitors after postmetallization annealing

Masafumi Hirose, Toshihide Nabatame, Yoshihiro Irokawa, Erika Maeda, Akihiko Ohi, Naoki Ikeda, Liwen Sang, Yasuo Koide, Hajime Kiyono.
Journal of Vacuum Science & Technology A 39 [1] 012401. 2021.
https://doi.org/10.1116/6.0000626

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    Created at: 2021-02-17 03:00:18 +0900Updated at: 2025-03-11 07:15:56 +0900

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