HOME > Article > DetailInterface characteristics of β-Ga2O3/Al2O3/Pt capacitors after postmetallization annealingMasafumi Hirose, Toshihide Nabatame, Yoshihiro Irokawa, Erika Maeda, Akihiko Ohi, Naoki Ikeda, Liwen Sang, Yasuo Koide, Hajime Kiyono. Journal of Vacuum Science & Technology A 39 [1] 012401. 2021.https://doi.org/10.1116/6.0000626 NIMS author(s)NABATAME, ToshihideIROKAWA, YoshihiroOHI, AkihikoIKEDA, NaokiSANG, LiwenKOIDE, YasuoFulltext and dataset(s) on Materials Data Repository (MDR)Created at: 2021-02-17 03:00:18 +0900Updated at: 2024-03-31 14:13:17 +0900