Effect of off-cut angle of hydrogen-terminated diamond(111) substrate on the quality of AlN towards high-density AlN/diamond(111) interface hole channel | 研究者総覧SAMURAI - 物質・材料研究機構 (NIMS)

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Effect of off-cut angle of hydrogen-terminated diamond(111) substrate on the quality of AlN towards high-density AlN/diamond(111) interface hole channel

Masataka Imura, Ryan G. Banal, Meiyong Liao, Jiangwei Liu, Takashi Aizawa, Akihiro Tanaka, Hideo Iwai, Takaaki Mano, Yasuo Koide.

Journal of Applied Physics 121 [2] 025702. 2017.

https://doi.org/10.1063/1.4972979

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作成時刻: 2017-02-19 23:38:54 +0900更新時刻: 2024-09-08 04:39:46 +0900

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