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Effect of off-cut angle of hydrogen-terminated diamond(111) substrate on the quality of AlN towards high-density AlN/diamond(111) interface hole channel

Journal of Applied Physics 121 [2] 025702. 2017.

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    Created at: 2017-02-19 23:38:54 +0900Updated at: 2024-04-01 21:55:52 +0900

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