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Analysis of polar direction of AlN grown on (0001) sapphire and 6H-SiC substrates by high-temperature metal-organic vapor phase epitaxy using coaxial impact collision ion scattering spectroscopy

著者Masataka Imura, Tsuyoshi Ohnishi, Masatomo Sumiya, Meiyong Liao, Yasuo Koide, Hiroshi Amano, Mikk Lippmaa.
発表誌名PHYSICA STATUS SOLIDI C-CURRENT TOPICS IN SOLID STATE PHYSICS
発表年2010
言語English
DOIhttps://doi.org/10.1002/pssc.200983900

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