SAMURAI - NIMS Researchers Database

HOME > 会議録 > 書誌詳細

Electron Beam Induced Current Investigation of Stress-Induced Leakage and Breakdown Processes in High-k stacks

CHEN, Jun, SEKIGUCHI, Takashi, FUKATA, Naoki, TAKASE, Masami, CHIKYOW, Toyohiro, Ryu Hasunuma, Kikuo Yamabe, Motoyuki Sato, Yasuo Nara, Keisaku Yamada.

NIMS著者


Materials Data Repository (MDR)上の本文・データセット


    作成時刻: 2017-02-27 01:39:22 +0900更新時刻: 2017-03-17 03:42:18 +0900

    ▲ページトップへ移動