- Address
- 305-0044 茨城県つくば市並木1-1 [アクセス]
- プロフィール
- 研究概要
- タグクラウド
- 人のつながり
研究内容
- Keywords
応用物性・結晶工学
出版物2004年以降のNIMS所属における研究成果や出版物を表示しています。
研究論文
- 揚村 寿英, SEKIGUCHI, Takashi. Collection efficiency and acceptance maps of electron detectors for understanding signal detection on modern scanning electron microscopy. Microscopy. [1] (2018) 18-29 10.1093/jmicro/dfx124
- Wei Yi, Jun Uzuhashi, Jun Chen, Takashi Kimura, Satoshi Kamiyama, Tetsuya Takeuchi, Tadakatsu Ohkubo, Takashi Sekiguchi, Kazuhiro Hono. Cathodoluminescence and scanning transmission electron microscopy study of InGaN/GaN quantum wells in core-shell GaN nanowires. Applied Physics Express. 12 [8] (2019) 085003 10.7567/1882-0786/ab2e37
- Wei Yi, Jun Chen, Seiji Higuchi, Takashi Sekiguchi. Wafer-scale analysis of GaN substrate wafer by imaging cathodoluminescence. Applied Physics Express. 12 [5] (2019) 051005 10.7567/1882-0786/ab0db8
書籍
- 関口 隆史. CL, EBIC. 薄膜の評価技術ハンドブック. 2013 , 75-78
- SEKIGUCHI, Takashi, CHEN, Jun. Defect Characterization in Silicon by Electron-Beam-Induced Current and Cathodoluminescence Techniques. Defects and Impurities in Silicon Materials: An Introduction to Atomic-Level Silicon Engineering. 2016 , 343-373
- 関口 隆史. 電子線誘起電流、カソードルミネッセンス. シリコン結晶技術. 2015 , 422-426
会議録
- Kazuhiro Kumagai, Yuanzhao Yao, Jun Chen, Takashi Sekiguchi. Image instability during the electrical measurement in scanning electron microscope. PHYSICA STATUS SOLIDI C-CURRENT TOPICS IN SOLID STATE PHYSICS. 2011, 1407-1411
- LI, Jiguang, Wang, Xiaohui, KAMIYAMA, Hiroshi, ISHIGAKI, Takamasa, SEKIGUCHI, Takashi. RF plasma processing of Er-doped TiO2 luminescent nanoparticles. THIN SOLID FILMS. 2006, 292-296
- FUKATA, Naoki, Naoya Okada, Satoshi Matsushita, Takao Tsurui, Shun Ito, CHEN, Jun, SEKIGUCHI, Takashi, Noriyuki Uchida, Kouichi Murakami. Carrier doping of silicon nanowires synthesized by laser Ablation. Mater. Res. Soc. Symp. Proc.. 2007, 99999-99999
口頭発表
- SEKIGUCHI, Takashi. SEM Cathodoluminescence/EBIC study of widegap semiconductors and devices. Microscopy of Semiconducting Materials (MSM XX). 2017
- 宮村佳児, 原田博文, JIPTNERKarolin, SEKIGUCHI, Takashi, S. Nakano, K. Kakimoto. Improvement of 50cm square mono cast Si for solar cell application. WCPEC-6. 2014
- CHEN, Jun, SEKIGUCHI, Takashi, FUKATA, Naoki, TAKASE, Masami, NEMOTO, Yoshihiro, Ryu Hasunuma, Kikuo Yamabe, Motoyuki Sato, Keisaku Yamada, CHIKYOW, Toyohiro. EBIC and TEM Investigations of Current Leakage Sites in High-k Gate Stacks. MANA International Symposium 2010. 2010
特許
- 特許第5077863号 低真空走査型電子顕微鏡を用いた炭素系材料の微細加工方法とその装置 (2012)
- 特許第5294238号 電子素子 (2013)
- 特許第5464429号 四角形の断面を有する単結晶シリコンの育成方法 (2014)
所属学会
応用物理学会 金属学会 日本電子顕微鏡学会 物理学会
第二期開発予定
第二期開発予定