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Electron Beam Induced Current Investigation of Stress-Induced Leakage and Breakdown Processes in High-k stacks

CHEN, Jun, SEKIGUCHI, Takashi, FUKATA, Naoki, TAKASE, Masami, CHIKYOW, Toyohiro, Ryu Hasunuma, Kikuo Yamabe, Motoyuki Sato, Yasuo Nara, Keisaku Yamada.
IEEE IRPS 2009 Proceedings 333-338. 2009.

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