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AuthorYAMASAKI, Takahiro, TAJIMA, Nobuo, KANEKO, Tomoaki, NARA, Jun, SHIMIZU Tatsuo, KATO Koichi, OHNO, Takahisa.
Titleシリコン・カーバイド熱酸化プロセスに関する第一原理的研究
(A First Principles Study on the Processes of Silicon Carbide Thermal Oxidation)
Event name応用物理学会秋季学術講演会
Year of publication2015
LanguageJapanese
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