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ナノZrO2核生成層を用いた強誘電体HfxZr1−xO2薄膜の作製技術
(Fabrication technique of ferroelectric HfxZr1−xO2 thin films using nano-ZrO2 nucleation layer)
第79回応用物理学会秋季学術講演会. September 18, 2018-September 21, 2018. Invited
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2018-07-01 16:43:10 +0900Updated at: 2024-03-05 12:20:41 +0900