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AuthorNaoyuki Saito, Masanori Seoka, FUKATA, Naoki, CHEN, Jun, SEKIGUCHI, Takashi, HISHITA, Shunichi, kouichi Murakami.
Titleイオン注入によるSiナノワイヤへの不純物ドーピングと電気的活性化
(Impurity doping in Si nanowires by ion-implantation and electrical activation of implanted impurities)
Event name2008年秋季 第69回応用物理学会学術講演会
Year of publication2008
LanguageJapanese
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